MEMs

Question 1

Process of making circuits

Answer 1

• from a silicon ingot cut wafers
• using a mask project light through a lens, the pattern will be projected onto the wafer
• exposed photoresist is removed
• area unprotected by photoresist are etched by gases or doped in ions
• all photoresist is removed
• repeated with versions, if needed

Question 2

In photolithography what are masks used for

Answer 2

To expose only a selected part of the silicon wafer