Thermal Energy can cause physical changes to materials such as
MEMs devices can transduce thermal energy to create
Microactuators and microsensors
Two types of microactuators
Thermal bimorph
Fluid dispensers
Three types of micro sensors are
What do inkjet printers use?
The phase change aspect of microthermal actuation
What principle for bimorph actuators operate on?
Differential thermal expansion produces motion
> Width differential in two different arms creates one arm with a large heat sink and a temp differential. This causes one side to heat up and expand. Bending at the thin flexure
Four modes of heat transfer
Thermal heat capacity is analogous to
electrical capacitance
Thermocouples work by ___
The seebeck coefficient describes__
The voltage difference developed for a given temperature difference
What is a thermister?
A thermal resistor with significant temp sensitivity
4 point probe measurement
How does a pirani gauge work?
How does a MEMs thermal accelerometer work?
A bubble of hot air is created between two temp sensors.
- under acceleration, the bubble will move in the opposite direction of acceleration (buoyancy), setting off one of the temp sensors
Hot wire anemometry is used for
Measuring fluid velocity
Thermal bubble anemometer
Uses the same structure as a thermal accelerometer, using forced convection rather than acceleration to move thermal bubble